Vacuum outgassing installation

Demaco produced a vacuum outgassing installation for the research institute TNO, which is used to measure the outgassing of small samples using a Quadruple Mass spectrometer.

The analyzing chamber and the load lock can both be baked-out to very high temperatures, to be able to achieve a very clean ultra-high-vacuum. Also the sample holder itself is provided with a sample heater for 250°C, so the outgassing of these samples can be measured during temperature changes. The pumping system is provided with “dry” pumps. The challenge about this system was to make a spectrum of the residual gasses (except for hydrogen) into the 10-11 mbar region.